Author:
Kalkowski Gerhard,Zeuske Jacob R.,Risse Stefan,Müller Sandra,Peschel Thomas,Rohde Mathias
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference10 articles.
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5. Electrostatic chuck for EUV masks
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