Author:
Fan Wei,Morikawa Yuji,Higuchi Takeshi,Matsui Yoshihiko,Yamamoto Tomoe,Sabens David,Kozak Brian
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference6 articles.
1. A. Hallen, M. Linnarsson, Surf. Coat. Technol. 306, 190 (2016)
2. A. Hallén, Mater. Sci. Forum 896, 338 (2000)
3. G. Kalkowski, Microelectron. Eng. 61–62, 357 (2002)
4. J. Kanno, Vac. Sic. Tech. B 21, 2371 (2003)
5. A.W. Moore, J. Cryst. Growth 106, 6 (1990)