Optical and electrical evaluations of SiGe layers on insulator fabricated using Ge condensation by dry oxidation
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference24 articles.
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4. SiGe-based semiconductor-on-insulator substrate created by low-energy separation-by-implated-oxygen;Fukatsu;Appl Phys Lett,1998
5. Fabrication of strained Si on an ultrathin SiGe-on-insulator virtual substrate with a high-Ge fraction;Tezuka;Appl Phys Lett,2001
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