Specific features of multiple-gate MOSFET threshold voltage and subthreshold slope behavior at high temperatures

Author:

Kilchytska V.,Collaert N.,Jurczak M.,Flandre D.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference31 articles.

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3. Ideal rectangular cross-section Si-Fin channel double-gate MOSFETs fabricated using orientation-dependent wet etching;Liu;Electron Dev Lett,2003

4. Spacer FinFET: nanoscale double-gate CMOS technology for the Terabit era;Choi;Solid-State Electron,2002

5. Experimental evaluation of gate architecture influence on DG SOI MOSFETs performance;Widiez;IEEE Trans Electron Dev,2005

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