Author:
Heister U,Krempel-Hesse J,Szczyrbowski J,Teschner G,Bruch J,Bräuer G
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Antireflective coatings on large scale substrates produced by reactive twin-magnetron sputtering
2. H. Schilling, J. Szczyrbowski, M. Ruske, W. Lenz, Soc. Vac. Coaters, 41st Annu. Tech. Conf. Proc., Boston, 1998.
3. J. Szczyrbowski, G. Teschner, Soc. Vac. Coaters, 38th Annu. Tech. Conf. Proc., Chicago, 1995, p. 389.
4. New approaches for reactive sputtering of dielectric materials on large scale substrates
5. A Boozenny, J. Hoog, Patent WO 91/07521, 1990.
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