3.2:Invited Paper: Application of Rotation Magnet Sputtering Technology to a-IGZO Film Depositions
Author:
Affiliation:
1. Tohoku University; Japan
Publisher
Wiley
Reference14 articles.
1. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
2. Influence of Energetic Oxygen Bombardment on Conductive ZnO Films
3. Origin of electrical property distribution on the surface of ZnO:Al films prepared by magnetron sputtering
4. Analysis of relevant plasma parameters for ZnO:Al film deposition based on data from reactive and non-reactive DC magnetron sputtering
5. Effect of O-Ion Beam Irradiation during RF-Magnetron Sputtering on Characteristics of CoFeB–MgO Magnetic Tunnel Junctions
Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Studies on fully transparent Al–Sn–Zn–O thin-film transistors fabricated on glass at low temperature;Japanese Journal of Applied Physics;2015-02-09
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