Fabrication techniques and material properties of dielectric MgO thin films—A status review
Author:
Publisher
Elsevier BV
Subject
Industrial and Manufacturing Engineering
Reference195 articles.
1. Oxygen treatment effects on properties of MgO thin films grown on single-crystalline diamond (100)
2. Properties of thin MgO films grown on single-crystalline CVD diamond
3. X-ray photoelectron spectroscopy characterization and morphology of MgO thin films grown on single-crystalline diamond (100)
4. Infrared and high‐energy electron diffraction analyses of electron‐beam‐evaporated MgO films
5. Electron induced degradation of E-beam evaporated MgO layers
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3. Suppressing Interfacial Layer Formation in ZrO2-Based Capacitors with TiN Electrodes via a MgO Thin-Film Oxygen Diffusion Barrier;ACS Applied Electronic Materials;2024-04-24
4. Reliable operation of Cr2O3:Mg/β-Ga2O3 p–n heterojunction diodes at 600 °C;Applied Physics Letters;2024-04-08
5. MgO as an Additional Layer at the Input Side of the Microchannel Plate;2023 IEEE 33rd International Conference on Microelectronics (MIEL);2023-10-16
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