Antireflective coatings on large scale substrates produced by reactive twin-magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference3 articles.
1. Society of Vacuum Coaters;Szczyrbowski,1995
2. Proc. 3rd Int. Symp. on Sputtering and Plasma Processes (ISSP '95);Bräuer,1995
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