Out-of-plane MEMS-based mechanical airflow sensor co-integrated in SOI CMOS technology-Reference-Cited by-同舟云学术

Out-of-plane MEMS-based mechanical airflow sensor co-integrated in SOI CMOS technology

Published:2014-02 Issue: Volume:206 Page:67-74
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

André Nicolas,Rue Bertrand,Scheen Gilles,Flandre Denis,Francis Laurent A.,Raskin Jean-Pierre

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference41 articles.

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5. VHF band-pass filter based on a single CMOS–MEMS double-ended tuning fork resonator;Lopez;Procedia Chemistry,2009

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