A 5.8-GHz VCO with CMOS-compatible MEMS inductors-Reference-Cited by-同舟云学术

A 5.8-GHz VCO with CMOS-compatible MEMS inductors

Published:2007-09 Issue:1-2 Volume:139 Page:187-193
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Tseng Sheng-Hsiang,Hung Ying-Jui,Juang Ying-Zong,Lu Michael S.-C.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Fully integrated low phase-noise VCOs with on-chip MEMS inductors;Park;IEEE Trans. Microw. Theory Technol.,2003

2. Allen, Surface micromachined solenoid inductors for high frequency applications;Kim;IEEE Trans. Components Packaging Manuf. Technol.,1998

3. Copper-encapsulated silicon micromachined structures;Andrew Yeh;IEEE J. Microelectromech. Syst.,2000

4. Out-of-plane high-Q inductors on low-resistance silicon;Chua;IEEE J. Microelectromech. Syst.,2003

5. G. K. Fedder, CMOS-base sensors, in: IEEE Sensors, Oct. 31–Nov. 3, 2005. pp. 125–128.

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