Author:
Park Y.K.,Pászti F.,Takai M.,Temmel G.,Buerte E.P.,Ryssel H.,Wiget R.,Kinomura A.,Horino Y.,Fujii K.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
2 articles.
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1. Development of nanoprobe TOF-RBS system for semiconductor process;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2003-09
2. Medium energy nuclear microprobe with enhanced sensitivity for semiconductor process analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-07