Development of nanoprobe TOF-RBS system for semiconductor process

Author:

Takayama H.,Iwasaki K.,Hayashi K.,Takai M.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference12 articles.

1. The National Technology Roadmap for Semiconductors, Semiconductor Industry Association, 2001

2. Ir and Rh silicide formation investigated by microprobe RBS

3. Application of medium energy nuclear microprobe to semiconductor process steps

4. Backscattering Spectrometry;Chu,1978

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