Author:
Takayama H.,Iwasaki K.,Hayashi K.,Takai M.
Subject
Instrumentation,Nuclear and High Energy Physics
Reference12 articles.
1. The National Technology Roadmap for Semiconductors, Semiconductor Industry Association, 2001
2. Ir and Rh silicide formation investigated by microprobe RBS
3. Application of medium energy nuclear microprobe to semiconductor process steps
4. Backscattering Spectrometry;Chu,1978
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