Medium energy nuclear microprobe with enhanced sensitivity for semiconductor process analysis

Author:

Tajima J,Kado S,Park Y.K,Mimura R,Takai M

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Tertiary electrons in single-event time-of-flight Rutherford backscattering spectrometry;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-10

2. Improvement of depth resolution and detection efficiency by control of secondary-electrons in single-event three-dimensional time-of-flight Rutherford backscattering spectrometry;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-04

3. Study on spatial resolution of three-dimensional analysis by full count TOF-RBS with beryllium nanoprobe;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2012-02

4. Three dimensional measurement of nanostructures by single event TOF-RBS with nuclear nano probe;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2011-10

5. Study on time resolution of single event TOF-RBS measurement;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2010-06

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