Optical constants of Er2O3-Al2O3 films studied by spectroscopic ellipsometry
Author:
Publisher
Elsevier BV
Subject
Geochemistry and Petrology,General Chemistry
Reference9 articles.
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2. Rare-earth oxide thin films for gate dielectrics in microelectronics;Leskela;J. Alloys Compd.,2006
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2. In situ study on the thermal stability and interfaces properties of Er 2 O 3 /Al 2 O 3 /Si multi stacked films by X-ray photoelectron spectroscopy;Superlattices and Microstructures;2017-04
3. Influences of high-temperature annealing on atomic layer deposited Al2O3/4H-SiC;Chinese Physics B;2013-07
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