Study of p-6P Molecule Growth by In-Situ and Real-Time Spectroscopic Ellipsometry

Abstract

Abstract As an important analytical method for thin film growth, spectroscopic ellipsometry plays an active role in investigating thin film growth mechanism of molecular beam epitaxial especially under in-situ and real-time environment. In this paper, the dynamic data presenting p-6P molecule film growth on mica substrates at different evaporation temperatures have been obtained under ultra-high vacuum by a self-designed in-situ and real-time spectroscopic ellipsometry system. It is shown that the strength of p-6P molecular ellipsometry signal increases as the amount of molecule deposited increases, and there is a negative characteristic peak at 3.9 eV, caused by electron transition of the p-6P molecule from the highest occupied molecular orbital to the lowest unoccupied molecular orbital, which can be considered to be an optical characteristics of p-6P molecule.