Controllable phase formation and physical properties of yttrium oxide films governed by substrate heating and bias voltage-Reference-Cited by-同舟云学术

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Controllable phase formation and physical properties of yttrium oxide films governed by substrate heating and bias voltage

Published:2015-08 Issue:7 Volume:41 Page:8921-8930
ISSN:0272-8842
Container-title:Ceramics International
language:en
Short-container-title:Ceramics International

Author:

Lei Pei,Dai Bing,Zhu Jiaqi,Chen Xiaoting,Liu Gang,Zhu Yuankun,Han Jiecai

Funder

National Natural Science Foundation of China

Heilongjiang Province Outstanding Youth Fund

Natural Science Foundation of Shanghai

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference42 articles.

1. The binary rare earth oxide;Adachi;Chem. Rev.,1998

2. Thermodynamics of rare earth sesquioxides;Zinkevich;Prog. Mater. Sci.,2007

3. Perspective of ODS alloys application in nuclear enviroments;Ukai;J. Nucl. Mater.,2002

4. Atomic beam deposition of lanthanum- and yttrium-based oxide thin films for gate dielectrics;Guha;Appl. Phys. Lett.,2000

5. Electron energy-loss spectroscopy analysis of interface structure of yttrium oxide gate dielectrics on silicon;Niu;Appl. Phys. Lett.,2002

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