HiPIMS and bipolar HiPIMS techniques for tunable phase formation of yttrium oxide thin films at low-temperature-Reference-Cited by-同舟云学术

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HiPIMS and bipolar HiPIMS techniques for tunable phase formation of yttrium oxide thin films at low-temperature

Published:2024-08 Issue: Volume:226 Page:113336
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Ahn Soeun^ORCID,Jeong Eunbi^ORCID,Jeon Kyoungho,Lim Sang Ho,Han Seunghee^ORCID

Funder

Korea Ministry of SMEs and Startups

Publisher

Elsevier BV

Reference47 articles.

1. Stability of rare earth oxides in a moist environment at elevated temperatures—experimental and thermodynamic studies;Courcot;J. Eur. Ceram. Soc.,2010

2. Effect of high temperature swaging and annealing on the mechanical properties and thermal conductivity of W–Y2O3;Xie;J. Nucl. Mater.,2015

3. Structure, morphology and optical properties of nanocrystalline yttrium oxide (Y2O3) thin films;Mudavakkat;Opt. Mater.,2012

4. Durable 3–5 μm transmitting infrared window materials;Harris;Infrared Phys. Technol.,1998

5. Hydrophobicity of rare-earth oxide ceramics;Azimi;Nat. Mater.,2013

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