Spectroscopic ellipsometry: a useful tool to determine the refractive indices and interfaces of In0.52Al0.48As and In0.53AlxGa0.47−xAs layers on InP in the wavelength range 280

Spectroscopic ellipsometry: a useful tool to determine the refractive indices and interfaces of In0.52Al0.48As and In0.53AlxGa0.47−xAs layers on InP in the wavelength range 280–1900 nm

Published:1993-11 Issue:2-3 Volume:21 Page:174-176
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Dinges H.W.,Burkhard H.,Lösch R.,Nickel H.,Schlapp W.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference10 articles.

1. Proc. 4th Eur. Conf. Int. Optics;Krause,1987

2. Refractive indices of InAlAs and InGaAs/InP from 250 to 1900 nm determined by spectroscopic ellipsometry

3. Optical properties ofIn1−xGaxAsyP1−yfrom 1.5 to 6.0 eV determined by spectroscopic ellipsometry

4. Optical properties of In1−xGaxP1−yAsy, InP, GaAs, and GaP determined by ellipsometry

5. Determination of refractive indexes of In0.52Al0.48As on InP in the wavelength range from 250 to 1900 nm by spectroscopic ellipsometry

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