Characteristics of sub-atmospheric pressure glow discharge plasmas for preparation of a-C:H films
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference21 articles.
1. Deposition mechanisms for promoting sp3 bonding in diamond-like carbon;Robertson;Diam. Relat. Mater.,1993
2. Ion-beam deposition of thin films of diamond like carbon;Aisenberg;J. Appl. Phys.,1971
3. Effect of ion implantation on DLC preparation using PBIID process;Oka;IEEE Trans. Plasma Sci.,2006
4. Synthesis of diamond-like carbon films by nanopulse plasma chemical vapor deposition at subatmospheric pressure;Ohtake;Jpn. J. Appl. Phys.,2004
5. Synthesis of diamond-like carbon films by nanopulse plasma chemical vapor deposition in open air;Kondo;Jpn. J. Appl. Phys.,2005
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effect of gas flow on the nanoparticles transport in dusty acetylene plasmas;Plasma Science and Technology;2023-06-09
2. Effect of methane content and the oscillating electric field between electrodes on atmospheric Ar/methane plasma jet and DLC coating deposition;Plasma Science and Technology;2020-06-03
3. Preparation of hydrogenated amorphous carbon films using a microsecond-pulsed DC capacitive-coupled plasma chemical vapor deposition system operated at high frequency up to 400 kHz;Japanese Journal of Applied Physics;2018-05-23
4. Molecular Dynamics Simulations of Hydrocarbon Film Growth from Acetylene Monomers and Radicals: Effect of Substrate Temperature;The Journal of Physical Chemistry C;2018-05-22
5. Optical and mass spectroscopic properties of microwave CH 4 /H 2 /Ar plasma for diamond deposition in a resonance cavity;Vacuum;2018-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3