Preparation of hydrogenated amorphous carbon films using a microsecond-pulsed DC capacitive-coupled plasma chemical vapor deposition system operated at high frequency up to 400 kHz-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Preparation of hydrogenated amorphous carbon films using a microsecond-pulsed DC capacitive-coupled plasma chemical vapor deposition system operated at high frequency up to 400 kHz

Published:2018-05-23 Issue:6S2 Volume:57 Page:06JF02
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Al Mamun Md Abdullah^ORCID,Furuta Hiroshi^ORCID,Hatta Akimitsu^ORCID

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/57/i=6S2/a=06JF02/pdf

Reference40 articles.

1. Diamond-like amorphous carbon

2. Diamond-like carbon: state of the art

3. Plasma Deposition of Diamond-Like Carbon

4. Diamond-like carbon — present status

5. Ion‐Beam Deposition of Thin Films of Diamondlike Carbon

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High value utilization of inferior diesel for BTX production: Mechanisms, catalysts, conditions and challenges;Applied Catalysis A: General;2021-04

2. The Effects of Magnetic Field on the Properties of Diamond-Like Carbon Films Produced by High-Density Helicon Wave Plasma;IEEE Transactions on Plasma Science;2020-07

3. High Metal–Acid Balance and Selective Hydrogenation Activity Catalysts for Hydrocracking of 1-Methylnaphthalene to Benzene, Toluene, and Xylene;Industrial & Engineering Chemistry Research;2020-03-03

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP