Optical and mass spectroscopic properties of microwave CH 4 /H 2 /Ar plasma for diamond deposition in a resonance cavity
Author:
Funder
National Natural Science Foundation of China
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference32 articles.
1. Plasma Generation and Beam Extraction on Reentrant-Cavity-Type Electron Cyclotron Resonance Ion Source
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4. Multiple substrate microwave plasma-assisted chemical vapor deposition single crystal diamond synthesis
5. Methyl radical and H‐atom concentrations during diamond growth
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