Synthesis of Diamond-like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition at Subatmospheric Pressure-Reference-Cited by-同舟云学术

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Synthesis of Diamond-like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition at Subatmospheric Pressure

Published:2004-10-08 Issue:No. 11A Volume:43 Page:L1406-L1408
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Ohtake Naoto,Saito Takao,Kondo Yoshimasa,Hosono Shintaro,Nakamura Yukinori,Imanishi Yu-ichiro

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/43/i=11A/a=L1406/pdf

Cited by 26 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Improvement of deposition characteristics of silicon oxide layers using argon-based atmospheric-pressure very high-frequency plasma;Journal of Applied Physics;2022-09-14

2. Deposition phenomena of diamond-like carbon coating on inner surface of circular metal tube by nanopulse plasma chemical vapor deposition;Diamond and Related Materials;2022-01

3. Effects of Substrate Temperature on Film Hardness and Hydrogen Content in Diamond-like Carbon Films Prepared with a Repetitive Nanosecond Pulsed Glow Hydrogen/Methane Discharge Plasma;Plasma and Fusion Research;2021-02-26

4. Properties and Classification of Diamond-Like Carbon Films;Materials;2021-01-09

5. Preparation of DLC films on inner surfaces of metal tubes by nanopulse plasma CVD;Surface and Coatings Technology;2019-12

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