Effects of Substrate Temperature on Film Hardness and Hydrogen Content in Diamond-like Carbon Films Prepared with a Repetitive Nanosecond Pulsed Glow Hydrogen/Methane Discharge Plasma
Author:
Affiliation:
1. Graduate School of Engineering, University of Hyogo
Publisher
Japan Society of Plasma Science and Nuclear Fusion Research
Subject
Condensed Matter Physics
Link
https://www.jstage.jst.go.jp/article/pfr/16/0/16_1206038/_pdf
Reference11 articles.
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3. [3] Y. Kikuchi et al., Jpn. J. Appl. Phys. 56, 100306 (2017).
4. [4] Y. Oka et al., IEEE Trans. Plasma Sci. 34, 1183 (2006).
5. [5] A.C. Ferrari et al., Phys. Rev. B 61, 14095 (2000).
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1. Low-Temperature Deposition of Diamond-like Carbon Films Using a Repetitive Nanosecond Pulsed Glow Discharge Plasma Operated in Burst Mode;Plasma and Fusion Research;2022-03-30
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