Low-Temperature Deposition of Diamond-like Carbon Films Using a Repetitive Nanosecond Pulsed Glow Discharge Plasma Operated in Burst Mode-Reference-Cited by-同舟云学术

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Low-Temperature Deposition of Diamond-like Carbon Films Using a Repetitive Nanosecond Pulsed Glow Discharge Plasma Operated in Burst Mode

Published:2022-03-30 Issue:0 Volume:17 Page:1206031-1206031
ISSN:1880-6821
Container-title:Plasma and Fusion Research
language:en
Short-container-title:Plasma and Fusion Research

Author:

MINE Takuma¹,MASAI Ryohei¹,KAWAGUCHI Mizuki²,KIKUCHI Yusuke¹

Affiliation:

1. Graduate School of Engineering, University of Hyogo

2. School of Engineering, University of Hyogo

Publisher

Japan Society of Plasma Science and Nuclear Fusion Research

Subject

Condensed Matter Physics

Link

https://www.jstage.jst.go.jp/article/pfr/17/0/17_1206031/_pdf

Reference10 articles.

1. [1] C. Zou et al., Jpn. J. Appl. Phys. 55, 115501 (2016).

2. [2] Y. Hirayama et al., Surf. Interface Anal. 52, 850 (2020).

3. [3] C. Bai et al., Friction 9, 627 (2021).

4. [4] K. Ioka et al., Plasma Fusion Res. 16, 1206038 (2021).

5. [5] A. von Keudell et al., Diamond Relat. Mater. 11, 969 (2002).

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