Synthesis of Diamond-Like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition in Open Air-Reference-Cited by-同舟云学术

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Synthesis of Diamond-Like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition in Open Air

Published:2005-12-16 Issue:No. 52 Volume:44 Page:L1573-L1575
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Kondo Yoshimasa,Saito Takao,Terazawa Tatsuya,Saito Masanori,Ohtake Naoto

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 20 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Improvement of deposition characteristics of silicon oxide layers using argon-based atmospheric-pressure very high-frequency plasma;Journal of Applied Physics;2022-09-14

2. Evidence of diamond-like carbon phase formation due to 80 keV Xe + ion impact on pencil-lead graphitic systems with oblique angle incidence;EPL (Europhysics Letters);2019-03-11

3. Diamond-like carbon film preparation using a high-repetition nanosecond pulsed glow discharge plasma at gas pressure of 1 kPa generated by a SiC-MOSFET inverter power supply;Japanese Journal of Applied Physics;2017-09-12

4. Characteristics of sub-atmospheric pressure glow discharge plasmas for preparation of a-C:H films;Vacuum;2017-02

5. Development of open air silicon deposition technology by silane-free atmospheric pressure plasma enhanced chemical transport under local ambient gas control;Japanese Journal of Applied Physics;2016-06-20

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