Dynamic behavior of clusters in the early stage of SiC (0001) epitaxial growth: A Kinetic Monte Carlo study
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference37 articles.
1. Material science and device physics in SiC technology for high-voltage power devices;Kimoto;Jpn. J. Appl. Phys.,2015
2. Technological breakthroughs in growth control of silicon carbide for high power electronic devices;Matsunami;Jpn. J. Appl. Phys.,2004
3. Chemical vapor deposition and characterization of 6H‐SiC thin films on off‐axis 6H‐SiC substrates;Kong;J. Appl. Phys.,1988
4. Homoepitaxial growth of 4H-SiC on on-axis C-face substrates by chemical vapor depositon;Kojima;J. Cryst. Growth,2004
5. CVD growth of 3C-SiC on 4H/6H mesas;Neudeck;Chem. Vap. Depos.,2006
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Influence of Carbon Source on the Buffer Layer for 4H-SiC Homoepitaxial Growth;Materials;2024-05-29
2. Microscopic study of submonolayer nucleation characteristics during GaN (0001) homoepitaxial growth;Journal of Vacuum Science & Technology A;2023-10-26
3. Size distribution of clusters and nucleation preference of trimers during SiC (0001) surface epitaxial growth under low coverage;Journal of Vacuum Science & Technology A;2023-06-29
4. Study on three-dimensional critical nucleation on a planar substrate of 3C-SiC crystal;Journal of Crystal Growth;2023-06
5. Effect of Deposition Flux on Polytypic Competitive Growth of SiC Crystal by Kinetic Monte Carlo Method;physica status solidi (b);2022-11-09
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3