Organosilicon films deposited in low-pressure plasma from hexamethyldisiloxane — A review
Author:
Funder
CAPES
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
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4. Simulation study of organosilicon coating of a spherical nanoparticle immersed in a low-pressure HMDSO/O2 plasma;Physica Scripta;2023-11-30
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