Barrier SiO2-like coatings for archaeological artefacts preservation
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/768/i=1/a=012013/pdf
Reference8 articles.
1. Characterization of the Chemical Kinetics in an O2/HMDSO RF Plasma for Material Processing
2. A study on adhesion and footing issues of HMDSO films as bottom antireflective coating for deep UV lithographies
3. Deposition of HMDSO-based coatings on PET substrates using an atmospheric pressure dielectric barrier discharge
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