Author:
Muro H.,Kaneko H.,Kiyota S.,French P.J.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Silicon accelerometer;Rudolf;Proc. 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987
2. Precision accelerometers with μg resolution;Rudolf;Sensors and Actuators,1990
3. Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique;Suzuki;Sensors and Actuators,1990
4. Capacitive silicon accelerometer with highly symmetrical design;Seidel;Sensors and Actuators,1990
5. An ASIC for high-resolution capacitive microaccelerometer;Leuthold;Sensors and Actuators,1990
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献