Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference3 articles.
1. A micromechanical capacitive accelerometer with a two-point inertial-mass suspension;Rudolf;Sensors and Actuators,1983
2. Silicon microaccelerometers;Rudolf;Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987
3. Precision accelerometers with μg resolution;Rudolf;Sensors and Actuators,1990
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