Precision accelerometers with μg resolution-Reference-Cited by-同舟云学术

Precision accelerometers with μg resolution

Published:1990-02 Issue:1-3 Volume:21 Page:297-302
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Rudolf F.,Jornod A.,Bergqvist J.,Leuthold H.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. A micromechanical capacitive accelerometer with a two-point inertial-mass suspension;Rudolf;Sensors and Actuators,1983

2. Silicon microaccelerometer;Rudolf;Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

3. Mikromechanischer, kapazitiver Beschleunigungssensor mit symmetrischer Aufhängung;Seidel;Mikromechanik, Heidelberg, F.R.G.,14151989

4. A silicon based micromechanical accelerometer with cross acceleration sensitivity compensation;Sandmaier;Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

5. Semiconductor accelerometer for automotive controls;Tsugai;Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

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