Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique-Reference-Cited by-同舟云学术

Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique

Published:1990-02 Issue:1-3 Volume:21 Page:316-319
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Suzuki S.,Tuchitani S.,Sato K.,Ueno S.,Yokota Y.,Sato M.,Esashi M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. Novel electrochemical micro-machining and its application for semiconductor acceleration sensor IC;Nakamura;Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers'87), Tokyo, Japan,251987

2. Silicon diaphragm capacitive sensor for pressure, flow, acceleration and attitude measurement;Suminto;Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

3. Silicon micro accelerometer;Rudolf;Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

4. A silicon based micromechanical accelerometer with cross acceleration sensitivity compensation;Sandmaier;Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

5. Semiconductor accelerometer for automotive controls;Tsugai;Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

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