Capacitive silicon accelerometer with highly symmetrical design-Reference-Cited by-同舟云学术

Capacitive silicon accelerometer with highly symmetrical design

Published:1990-02 Issue:1-3 Volume:21 Page:312-315
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Seidel H.,Riedel H.,Kolbeck R.,Mück G.,Kupke W.,Königer M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. A batch-fabricated silicon accelerometer;Roylance;IEEE Trans. Electron Devices, ED-26,1979

2. A miniature silicon accelerometer with built-in damping;Terry;Tech. Digest, Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, U.S.A.,691988

3. Micromechanical accelerometer integrated with MOS detection circuitry;Petersen;IEEE Trans. Electron Devices, ED-29,1982

4. Silicon microaccelerometer;Rudolf;Proc. 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

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