Effect of current density on micro-mechanical property of electrodeposited gold film evaluated by micro-compression-Reference-Cited by-同舟云学术

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Effect of current density on micro-mechanical property of electrodeposited gold film evaluated by micro-compression

Published:2022-04 Issue: Volume:436 Page:128315
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Omura Taro,Chen Chun-Yi,Chang Tso-Fu Mark,Yamane Daisuke,Ito Hiroyuki,Machida Katsuyuki,Masu Kazuya,Sone Masato

Funder

Japan Science and Technology Agency

Core Research for Evolutional Science and Technology

New Energy and Industrial Technology Development Organization

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference31 articles.

1. Design of sub-1g microelectromechanical systems accelerometers;Yamane;Appl. Phys. Lett.,2014

2. Investigation of metal interconnect for wafer-level and sealable miniaturized MEMS encapsulation;Tsai;IEEE Trans. Electron Devices,2021

3. Miniaturization of optical spectrometers;Yang;Science,2021

4. CMOS-MEMS based microgravity sensor and its application;Masu;ECS Trans.,2020

5. Pulse electroplating of ultra-fine grained au films with high compressive strength;Chen;Electrochem. Commun.,2016

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of the strain rate in compression of electrodeposited gold micro-pillars toward the design of MEMS components;Micro and Nano Engineering;2024-06

2. Multifaceted insights into Au coatings electrodeposited from a ChCl-EG based Deep Eutectic Solvent (DES): Unravelling the effect of surfactant polarity and current density on the morphology, mechanical properties, and anti-tarnishing efficacy;Surfaces and Interfaces;2024-06

3. Cross-sectional geometry effect on bending strength of gold micro-cantilever with trapezoidal cross-section;Micro and Nano Engineering;2024-06

4. Tailoring barrier layers design for haute couture through X-ray microanalysis: Insights and guidelines;Heliyon;2024-06

5. Multifaceted Insights into AU Coatings Electrodeposited from a Chcl-Eg Based Deep Eutectic Solvent (Des): Unravelling the Effect of Surfactant Polarity and Current Density on the Morphology, Mechanical Properties, and Anti-Tarnishing Efficacy;2024

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