Design of sub-1g microelectromechanical systems accelerometers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4865377
Reference22 articles.
1. Micromachined inertial sensors
2. A monolithic three-axis micro-g micromachined silicon capacitive accelerometer
3. Sub-Micro-Gravity In-Plane Accelerometers With Reduced Capacitive Gaps and Extra Seismic Mass
4. Pull-in-based μg-resolution accelerometer: Characterization and noise analysis
5. A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics
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