Dependence of Structural Design on Effective Young's Modulus of Ti/Au Multi-layered Micro-cantilevers-Reference-Cited by-同舟云学术

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Dependence of Structural Design on Effective Young's Modulus of Ti/Au Multi-layered Micro-cantilevers

Published:2024-06 Issue: Volume:23 Page:100249
ISSN:2590-0072
Container-title:Micro and Nano Engineering
language:en
Short-container-title:Micro and Nano Engineering

Author:

Watanabe Shunkai,Kurioka Tomoyuki,Chen Chun-Yi,Chang Tso-Fu Mark,Onishi Akira,Chakraborty Parthojit,Machida Katsuyuki,Ito Hiroyuki,Miyake Yoshihiro,Sone Masato

Funder

Core Research for Evolutional Science and Technology

Japan Science and Technology Agency

Japan Science and Technology Agency Strategic Basic Research Programs CREST

Publisher

Elsevier BV

Reference27 articles.

1. MEMS inertial sensors: a tutorial overview;Shaeffer;IEEE Commun. Mag.,2013

2. A high-resolution microchip optomechanical accelerometer;Krause;Nat. Photonics,2012

3. Evaluation of a low-cost MEMS accelerometer for distance measurement;Pang;J. Intell. Robot. Syst.,2001

4. A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics;IEEE J. Solid State Circuits,1999

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