Cross-sectional geometry effect on bending strength of gold micro-cantilever with trapezoidal cross-section-Reference-Cited by-同舟云学术

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Cross-sectional geometry effect on bending strength of gold micro-cantilever with trapezoidal cross-section

Published:2024-06 Issue: Volume:23 Page:100259
ISSN:2590-0072
Container-title:Micro and Nano Engineering
language:en
Short-container-title:Micro and Nano Engineering

Author:

Hori Ryohei,Fujita Kazuya,Chen Chun Yi,Kurioka Tomoyuki,Wu Jhen-Yang,Chang Tso-Fu Mark,Machida Katsuyuki,Ito Hiroyuki,Miyake Yoshihiro,Sone Masato

Funder

Japan Science and Technology Agency

Core Research for Evolutional Science and Technology

Publisher

Elsevier BV

Reference17 articles.

1. Data-driven application of MEMS-based accelerometers for leak detection in water distribution networks;Tariq;Sci. Total Environ.,2022

2. Autocalibration of MEMS accelerometers;Frosio;IEEE Trans. Instrum. Meas.,2009

3. Design of sub-1g microelectromechanical systems accelerometers;Yamane;Appl. Phys. Lett.,2014

4. Integrated CMOS-MEMS technology and its application;Machida,2010

5. A capacitive CMOS–MEMS sensor designed by multi-physics simulation for integrated CMOS–MEMS technology;Konishi;Jpn. J. Appl. Phys.,2014

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