Voiding induced stress redistribution and its reliability implications in metal interconnects
Author:
Publisher
Elsevier BV
Subject
Metals and Alloys,Polymers and Plastics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference36 articles.
1. Investigation of the stresses in continuous thin films and patterned lines by x‐ray diffraction
2. Characteristics of thermal stresses in Al(Cu) fine lines. II. Passivated line structures
3. A new x-ray diffractometer design for thin-film texture, strain, and phase characterization
4. X‐ray diffraction determination of the effect of various passivations on stress in metal films and patterned lines
5. An x-ray method for direct determination of the strain state and strain relaxation in micron-scale passivated metallization lines during thermal cycling
Cited by 29 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. In-situ revealing the degradation mechanisms of Pt film over 1000 °C;Journal of Materials Science & Technology;2021-12
2. Investigation on Anisotropy Shrinkage and Conductivity of Ag Microwires Sintering Assisted by the Tamping Effect of Alternating Electric Field;ECS Journal of Solid State Science and Technology;2020-03-18
3. Influence of local thermal dissipation on electromigration in an Al thin-film line;Microelectronics Reliability;2016-10
4. FABRICATION AND THERMAL STABILITY OF A1CrTaTiNi/(A1CrTaTiNi)N BILAYER DIFFUSION BARRIER;Acta Metallurgica Sinica;2013
5. Stress Migration Induced Formation of Voids / Hillocks in Tungsten Films;Advanced Materials Research;2011-08
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3