X‐ray diffraction determination of the effect of various passivations on stress in metal films and patterned lines
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.345411
Reference8 articles.
1. Measurement and Interpretation of stress in aluminum-based metallization as a function of thermal history
2. A new x-ray diffractometer design for thin-film texture, strain, and phase characterization
3. Centroid shifts due to axial divergence and other geometrical factors in Seemann–Bohlin diffractometry
4. Calculated elastic constants for stress problems associated with semiconductor devices
5. Evidence for Dislocation Transport of Hydrogen in Aluminum
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