Calculated elastic constants for stress problems associated with semiconductor devices
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1661935
Reference6 articles.
1. Measurement of Strains at Si‐SiO2 Interface
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4. Enhanced X‐Ray Diffraction from Substrate Crystals Containing Discontinuous Surface Films
5. Residual Thermoelastic Stresses in Bonded Silicon Wafers
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