1. 22-nm fully-depleted tri-gate CMOS transistors;Auth,2012
2. Si FinFET based 10nm technology with multi Vt gate stack for low power and high performance applications;Cho,2016
3. A 14nm logic technology featuring 2nd-generation FinFET, air-gapped interconnects, self-aligned double patterning and a 0.0588 μm2 SRAM cell size;Natarajan,2014
4. Ultrafast all-optical switching;Chai;Adv. Opt. Mater.,2017
5. A 7nm FinFET technology featuring EUV patterning and dual strained high mobility channels;Xie,2016