Investigation of transverse optical phonon of thin Si films embedded in periodic Mo/Si and W/Si multilayer mirrors-Reference-Cited by-同舟云学术

Investigation of transverse optical phonon of thin Si films embedded in periodic Mo/Si and W/Si multilayer mirrors

Published:2021-08 Issue: Volume:25 Page:101270
ISSN:2468-0230
Container-title:Surfaces and Interfaces
language:en
Short-container-title:Surfaces and Interfaces

Author:

Kumar Niranjan^ORCID,Nezhdanov Aleksey V.^ORCID,Garakhin Sergey A.,Smertin Ruslan M.,Yunin Pavel A.,Polkovnikov Vladimir N.^ORCID,Chkhalo Nikolay I.,Mashin Aleksandr I.

Funder

Russian Science Foundation

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,General Physics and Astronomy,Condensed Matter Physics,Surfaces and Interfaces,General Chemistry

Reference39 articles.

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4. Stress, microstructure, and stability of Mo/Si, W/Si, and Mo/C multilayer films;Windt;J. Vac. Sci. Technol. A,2000

5. Deposition of Mo/Si multilayers onto MEMS micromirrors and its utilization for extreme ultraviolet maskless lithography;Chkhalo;J. Vac. Sci. Technol. B,2017

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