High thermal stability of the reflectivity of Be/Al multilayer mirrors designed for extreme ultraviolet wavelength-Reference-Cited by-同舟云学术

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High thermal stability of the reflectivity of Be/Al multilayer mirrors designed for extreme ultraviolet wavelength

Published:2023-11 Issue: Volume:42 Page:103414
ISSN:2468-0230
Container-title:Surfaces and Interfaces
language:en
Short-container-title:Surfaces and Interfaces

Author:

Kumar Niranjan,Panda Kalpataru,Pleshkov Roman S,Nezhdanov Aleksey V,Polkovnikov Vladimir N,Yunin Pavel A,Chkhalo Nikolay I

Funder

Russian Science Foundation

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,General Physics and Astronomy,Condensed Matter Physics,Surfaces and Interfaces,General Chemistry

Reference29 articles.

1. Investigation of microstructure and reflectivity of thermally annealed Mo/Be and W/Be multilayer mirrors;Kumar;Surf. Interfaces,2022

2. Phase analysis of tungsten and phonon behavior of beryllium layers in W/Be periodic multilayers;Kumar;Phys. Chem. Chem. Phys.,2021

3. Investigation of transverse optical phonon of thin Si films embedded in periodic Mo/Si and W/Si multilayer mirrors;Kumar;Surf. Interfaces.,2021

4. Structural and residual stress changes in Mo/a-Si multilayer thin films with annealing;Kassner;J. Mater. Sci.,1996

5. Microstructure and phonon behavior in W/Si periodic multilayer structures;Kumar;J. Phys. D,2022

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