Multilayer mirror technology for soft-x-ray projection lithography
Author:
Publisher
The Optical Society
Reference15 articles.
1. Fabrication and testing of large area multilayer coated x-ray optics
2. Normal-incidence x-ray mirror for 7 nm
3. Fabrication of high‐reflectance Mo–Si multilayer mirrors by planar‐magnetron sputtering
4. Condenser optics, partial coherence, and imaging for soft-x-ray projection lithography
5. Soft x-ray reduction lithography using multilayer mirrors
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