Facile preparation of sol–gel-derived ultrathin and high-dielectric zirconia films for capacitor devices-Reference-Cited by-同舟云学术

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Facile preparation of sol–gel-derived ultrathin and high-dielectric zirconia films for capacitor devices

Published:2012-10 Issue:24 Volume:258 Page:10084-10088
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

You Hsin-Chiang,Chang Chun-Ming,Liu Tzeng-Feng,Cheng Chih-Chia,Chang Feng-Chih,Ko Fu-Hsiang

Funder

National Science Council of the Republic of China, Taiwan

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference19 articles.

1. Physical Characterization and Electrical Properties of Sol-Gel-Derived Zirconia Films

2. Formation of stable zirconium oxide on silicon by photo-assisted sol–gel processing

3. Annealing and doping effects on structure and optical properties of sol–gel derived ZrO2 thin films

4. Plasma-enhanced flexible metal–insulator–metal capacitor using high-k ZrO2 film as gate dielectric with improved reliability

5. Electrical and reliability characteristics of ZrO2 deposited directly on Si for gate dielectric application

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Solution processed zirconium oxide dielectric thin films for electronic applications;Journal of Materials Science: Materials in Electronics;2024-07

2. Stabilization of zirconia nanoparticles by collagen protein and calcium carbonate extracted from eggshell and its biodegradation, radical scavenging and mineralization activity;Arabian Journal of Chemistry;2023-10

3. Effect of Heat Treatment on Zirconium Oxide High‐k Gate Dielectric in Silicon‐Based Metal Oxide Semiconductor Capacitors;physica status solidi (a);2023-03-23

4. Effect of Annealing Temperature on the Structural, Optical, and Electrical Properties of Al-Doped ZrO2 Gate Dielectric Films Treated by the Sol–Gel Method;Coatings;2022-11-27

5. Fabrication and Electrical Properties of Novel ZnTiO₃/Si Capacitors with Various Zn(NO₃)₂ Concentrations;2022 IEEE 5th International Conference on Knowledge Innovation and Invention (ICKII );2022-07-22

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