Fabrication and Electrical Properties of Novel ZnTiO3/Si Capacitors with Various Zn(NO3)2 Concentrations-Reference-Cited by-同舟云学术

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Fabrication and Electrical Properties of Novel ZnTiO₃/Si Capacitors with Various Zn(NO₃)₂ Concentrations

Published:2022-07-22 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE 5th International Conference on Knowledge Innovation and Invention (ICKII )
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Author:

Yen Chih-Feng¹,Tsao Shen-Hao¹,Huang Yu-Ya¹,Hsu Hung-Chang¹,Zhong You-Ru¹,Chen Po-Chih¹,Pan Zhong-Wei¹

Affiliation:

1. National Kaohsiung University of Science and Technology,Department of Microelectronics Engineering,Kaohsiung,Taiwan

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9983535/9983517/09983549.pdf?arnumber=9983549

Reference11 articles.

1. Structural, Electrical and Dielectric Properties of DC Reactive Magnetron Sputtered ZrO₂ Films for Metal-Oxide-Semiconductor Devices

2. Optimizing n-ZnO/p-Si heterojunctions for photodiode applications

3. Surface passivation property of aluminum oxide thin film on silicon substrate by liquid phase deposition

4. Effect of phase transformation on optical and dielectric properties of pulsed laser deposited ZnTiO3 thin films

5. High dielectric constant oxides;roberston;Eur Phys J Appl Phys,2004

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