Author:
Abbadie A.,Hartmann J.M.,Besson P.,Rouchon D.,Martinez E.,Holliger P.,Di Nardo C.,Campidelli Y.,Billon T.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference28 articles.
1. Study of Rapid Thermal Precleaning for Si Epitaxial Growth
2. Megasonic Excited Ozonized Water for the Cleaning of Silicon Surfaces
3. Dry Cleaning for Fe Contaminants on Si and SiO2 Surfaces with Silicon Chlorides
4. P.G. Clark, J.W. Butterbaugh, G.P. Thomes, J.F. Weygand, T.J. Wagener and D.S. Becker, IEEE/Semi Advanced Semiconductor Manufacturing Conference and Workshop, May 2004.
5. Proceedings of the Sixth International Symposium on Electrochemical Society, 99-36;Funabashi,2000
Cited by
9 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献