Epitaxial growth and electrical properties of ultrathin La2Hf2O7 high-k gate dielectric films

Author:

Xiong Yu-Hua,Tu Hai-Ling,Du Jun,Wei Feng,Zhang Xin-Qiang,Yang Meng-Meng,Zhao Hong-Bin,Chen Da-Peng,Wang Wen-Wu

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference26 articles.

1. Structural and dielectric properties of amorphous ZrO2 and HfO2;Ceresoli;Physical Review B,2006

2. International Technology Roadmap for Semiconductors, ITRS2001, 2003, 2005, 2007, 2009, http://www.itrs.net/.

3. Crystalline oxides on silicon: the first five monolayers;McKee;Physical Review Letters,1998

4. Characterization of field-effect transistors with La2Hf2O7 and HfO2 gate dielectric layers deposited by molecular-beam epitaxy;Rittersma;Journal of Applied Physics,2006

5. La2Hf2O7 high-k gate dielectric grown directly on Si(001) by molecular-beam epitaxy;Dimoulas;Applied Physics Letters,2004

Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Electrochemical properties of complex pyrochlores;Pyrochlore Ceramics;2022

2. Ni doping significantly improves dielectric properties of La2O3 films;Journal of Alloys and Compounds;2020-05

3. Ta-doped modified Gd2O3 film for a novel high k gate dielectric;Journal of Materials Science & Technology;2019-10

4. Scaling Behaviour, Optical and Photoluminescence Properties of La2Hf2O Films with Annealing Treatments;IOP Conference Series: Materials Science and Engineering;2019-10-01

5. Influence of nanostructure formation on the crystal structure and morphology of epitaxially grown Gd2O3 on Si(001);Acta Crystallographica Section B Structural Science, Crystal Engineering and Materials;2019-01-23

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3