Boron diffusion in silicon: the anomalies and control by point defect engineering
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference222 articles.
1. R.A. Swalin, Atomic Diffusion in Semiconductors, second ed., Wiley, New York, 1972.
2. Point defects and dopant diffusion in silicon
3. Self-Diffusion in Silicon
4. Vacancy Distributions in Silicon and Methods for Their Accurate Determination
5. Gold and platinum diffusion: The key to the understanding of intrinsic point defect behavior in silicon
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