Texture of IBAD TiN films as a function of ion-beam intensity and angular incidence
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference10 articles.
1. Ion bombardment during thin film deposition and its influence on mechanical and chemical surface properties
2. Growth of thin films with preferential crystallographic orientation by ion bombardment during deposition
3. Average energy deposited per atom: A universal parameter for describing ion‐assisted film growth?
4. Effects of strain energy on the preferred orientation of TiN thin films
5. Competition between strain and interface energy during epitaxial grain growth in Ag films on Ni(001)
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